WFE fume extraction unit
Technical data
| Height | 200mm |
| Length | 140mm |
| Dimensions L x W x H | 140.0 x 140.0 x 200.0mm |
| Air Consumption | 30 l/min |
| Capacity (m³/h) | 30 m³/h |
| Compact Filter | Particle filter H13, broadband gas filter (50% activated carbon + 50% Chemisorb) |
| ESD Safe | Yes |
| Maximum Blower Vacuum (Pa) | 20,000 Pa |
| Maximum Capacity | 2 Workstations |
| Power | 6 Bar |
| UPC | 037103258267 |
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